Radioelektronikos terminų žodynas. – Vilnius : BĮ UAB „Litimo“. Kazimieras Gaivenis, Gytis Juška, Vidas Kalesinskas. 2000.
Deep reactive-ion etching — (DRIE) is a highly anisotropic etch process used to create deep penetration, steep sided holes and trenches in wafers, with aspect ratios of 20:1 or more. It was developed for microelectromechanical systems (MEMS), which require these features,… … Wikipedia
Reactive-ion etching — (RIE) is an etching technology used in microfabrication. It uses chemically reactive plasma to remove material deposited on wafers. The plasma is generated under low pressure (vacuum) by an electromagnetic field. High energy ions from the plasma… … Wikipedia
Isotropic etching — In semiconductor technology isotropic etching is non directional removal of material from a substrate via a chemical process using an etchant substance. The etchant may be a corrosive liquid or a chemically active ionized gas, known as a… … Wikipedia
décapage directionnel — kryptinis ėsdinimas statusas T sritis radioelektronika atitikmenys: angl. directional etching; orientation dependent etch vok. gerichtete Ätzen, n rus. направленное травление, n pranc. décapage directionnel, m; décapage orienté, m … Radioelektronikos terminų žodynas
décapage orienté — kryptinis ėsdinimas statusas T sritis radioelektronika atitikmenys: angl. directional etching; orientation dependent etch vok. gerichtete Ätzen, n rus. направленное травление, n pranc. décapage directionnel, m; décapage orienté, m … Radioelektronikos terminų žodynas
gerichtete Ätzen — kryptinis ėsdinimas statusas T sritis radioelektronika atitikmenys: angl. directional etching; orientation dependent etch vok. gerichtete Ätzen, n rus. направленное травление, n pranc. décapage directionnel, m; décapage orienté, m … Radioelektronikos terminų žodynas
kryptinis ėsdinimas — statusas T sritis radioelektronika atitikmenys: angl. directional etching; orientation dependent etch vok. gerichtete Ätzen, n rus. направленное травление, n pranc. décapage directionnel, m; décapage orienté, m … Radioelektronikos terminų žodynas
orientation-dependent etch — kryptinis ėsdinimas statusas T sritis radioelektronika atitikmenys: angl. directional etching; orientation dependent etch vok. gerichtete Ätzen, n rus. направленное травление, n pranc. décapage directionnel, m; décapage orienté, m … Radioelektronikos terminų žodynas
направленное травление — kryptinis ėsdinimas statusas T sritis radioelektronika atitikmenys: angl. directional etching; orientation dependent etch vok. gerichtete Ätzen, n rus. направленное травление, n pranc. décapage directionnel, m; décapage orienté, m … Radioelektronikos terminų žodynas
Silvaco — Infobox Company company name = Silvaco International company company type = Private Company| foundation = 1984 location = key people = Dr Ivan Pesic, President/CEO industry = Software Programming homepage = [http://www.silvaco.com/… … Wikipedia
